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Electrical and Computer EngineeringECE 384. Principles of Advanced Microelectronic ProcessingTeaches seniors and first year graduate students in Electrical Engineering advanced topics in semiconductor device processing. Covers the principles of advanced methods of pattern delineation, pattern transfer, modern material growth and how these are applied to produce novel and high performance devices and circuits in various semiconductor materials with special emphasis on compound semiconductors. Issues in computer simulation of processes and the manufacturing of devices and circuits are also covered.Prerequisite: ECE 344.
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