CHBE 457
Microelectronics Processing

Credit: 3 hours.


Introductory survey of chemical processing principles applied to microelectronic fabrication. Key concepts originate from chemical kinetics; thermodynamics; mass and energy balances; transport of mass, momentum and heat; and process synthesis and integration. Prerequisite: Junior or senior standing in Chemical and Biomolecular Engineering, Electrical and Computer Engineering, or Materials Science and Computer Engineering.