ECE 485
MEMS Devices & Systems

Credit:  3 hours.


Presents an introduction to the principles, fabrication techniques, and applications of microelectromechanical systems (MEMS). Gives an in-depth understanding of sensors and actuator principles and integrated microfabrication techniques for MEMS. It also consists of a comprehensive investigation of the state-of-the-art MEMS devices and systems. Same as IE 485 and ME 485. For engineering majors with senior standing.